Modern semiconductor equipment utilizes high precision, high mass linear and air-bearing stages. These stages require high power precision amplifiers. We have developed a proficient repair strategy for these drivers as well as the stages. Our repair capabilities include…
- Amplifier electronics repair
- Analog power supply repair
- Full functional testing and calibration
- Actual granite block repair from “crashed” stages
- Repair and replacement of precision pressure valves and gauges
Due to the size and complexity of stages, these repairs take place at our facility or in the field. We have a team of FSEs ready to make quick trips for critical situations.